Mined from Scientific Literature: Process Schemas for Atomic Layer Deposition and Etching in Materials Science

arXiv cs.AISeptember 14, 2026en

arXiv cs.AI

AI Global Wire

arXiv:2609.12139v1 Announce Type: new Abstract: Atomic layer deposition (ALD) and atomic layer etching (ALE) are reported heterogeneously across experimental and simulation literature in materials science, hindering comparison and machine-actionable reuse. We present four domain-expert-reviewed JSON Schemas for ALD and ALE experimental and simulation processes. Curated with schema-miner and grounded in QUDT using schema-miner pro, the schemas structure materials, process conditions, configurations , and measured or predicted results. We compare their scope, structure, and semantic grounding, and demonstrate their use for schema-guided literature extraction and publication of structured recor

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